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Technique
Mechanical Cross-section
Application

Cross-sectioning is a technique for mechanically exposing a plane of interest in a die or package, usually at right angles to an axis. It consists of grinding and polishing the specimen until the plane of interest is ready for optical/electron microscopy inspection or for further analysis. To avoid introducing artifact, initial preparation usually require the encapsulation of the specimen in plastic to give it stability, support & protection.


cross-section
Technique
Parallel Lap
Application

Parallel Lapping is the removal of material precisely from a specimen to produce a smooth, flat, unpolished surface to the required thickness and flatness.




cross-section
Technique
Ion Mill
Application

Ion milling is a physical etching technique whereby the ions of an inert gas are accelerated from a wide beam ion source and bombarded into a surface, resulting in sputtering of material from the surface. This process exposes underlying material while protecting it from mechanical stress. It is used to prepare polished cross-sectional samples prior to SEM analysis when manual mechanical polishing proves difficult.

Ion milling

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